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Beilstein J. Nanotechnol. 2013, 4, 750–757, doi:10.3762/bjnano.4.85
Figure 1: Growth rate of pure In2S3 a) as function of the process temperature b) as function of the In(acac)3...
Figure 2: Influence of the number of In2O3 cycles on (a) the growth rate while using H2O as oxygen precursor ...
Figure 3: Influence of the ratio of In2O3 cycles on the film absorption spectra when using H2O as oxygen prec...
Figure 4: Influence of a) the number of In2O3 cycles on the growth rate b) the number of process cycles on th...
Figure 5: Influence of the number of In2O3 cycle on the film transmittance when using O2 plasma as oxygen pre...
Figure 6: Influence of the number of In2O3 cycles a) on the absorption and b) optical band gap when using O2 ...
Figure 7: Surface mechanisms during the O2 plasma pulse.